Optimizing Robot Task Sequences and Cleaning Plans for Dual-armed Cluster Tools with 2-cyclic Chamber Cleaning Operations
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이태경 | ko |
| dc.contributor.author | 이태억 | ko |
| dc.date.accessioned | 2018-01-30T02:48:17Z | - |
| dc.date.available | 2018-01-30T02:48:17Z | - |
| dc.date.created | 2017-12-26 | - |
| dc.date.issued | 2017-11-04 | - |
| dc.identifier.citation | 2017추계 학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/238285 | - |
| dc.language | English | - |
| dc.publisher | 대한산업공학회 | - |
| dc.title | Optimizing Robot Task Sequences and Cleaning Plans for Dual-armed Cluster Tools with 2-cyclic Chamber Cleaning Operations | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 2017추계 학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | KAIST, 대전 | - |
| dc.contributor.localauthor | 이태억 | - |
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