Browse "RIMS Collection" by Subject silicon
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| A novel refractive silicon microlens array using bulk micromachining technology Lee, Choon-Sup; Han, Chul-Hi, SENSORS AND ACTUATORS A-PHYSICAL, v.88, no.1, pp.87 - 90, 2000-01 |
| Highly reliable ECR N2O-plasma polyoxide grown on heavily phosphorus-doped polysilicon films nae-in lee; jin-woo lee; chul-hi han, JOURNAL OF ELECTRONIC MATERIALS, v.28, no.12, pp.L31 - L33, 1999 |
| Simultaneous and Accurate Formation of Variously Shaped Holes in Silicon Substrate hi-deok lee; jae-kwan kim; chul-hi han, JAPANESE JOURNAL OF APPLIED PHYSICS, v.36, no.5A, pp.L529 - L531, 1997-05 |
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