Browse "RIMS Collection" by Subject SILICON DIOXIDE

Showing results 1 to 2 of 2

1
Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications

Lee, Young-Soo; Han, Ju-Hwan; Park, Jin-Seong; Park, Jozeph, Journal of Vacuum Science and Technology A, v.35, no.4, 2017-07

2
THE EFFECTS OF X-RAY IRRADIATION-INDUCED DAMAGE ON RELIABILITY IN MOS STRUCTURES

KIM, S; LEE, H; HAN, CH; Lee, Kwyro; CHOI, S; JEON, Y; DIFABRIZIO, E; et al, SOLID-STATE ELECTRONICS, v.38, no.1, pp.95 - 99, 1995-01

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