Browse "RIMS Collection" by Subject GAS-DIFFUSION-BARRIERS
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| Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications Lee, Young-Soo; Han, Ju-Hwan; Park, Jin-Seong; Park, Jozeph, Journal of Vacuum Science and Technology A, v.35, no.4, 2017-07 |
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