Browse "RIMS Collection" by Subject ECR plasma thermal oxidation
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| Application of Electron-Cyclotron-Resonance Plasma Thermal-Oxidation to Bottom Gate Polysilicon Thin-Film Transistors j.i. han; Kim, Choong Ki; c.h. han, JAPANESE JOURNAL OF APPLIED PHYSICS, v.35, no.2B, pp.930 - 933, 1996-02 |
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