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A new wide-dimensional freestanding microstructure fabrication technology using laterally formed porous silicon as a sacrificial layer Lee, CS; Lee, JD; Han, Chul-Hi, SENSORS AND ACTUATORS A-PHYSICAL, v.84, no.1-2, pp.181 - 185, 2000-08 |
A novel refractive silicon microlens array using bulk micromachining technology Lee, Choon-Sup; Han, Chul-Hi, SENSORS AND ACTUATORS A-PHYSICAL, v.88, no.1, pp.87 - 90, 2000-01 |
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