Browse "RIMS Collection" by Subject ALD
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| Atomic Layer Deposition of Ru Thin Film Using a Newly Synthesized Precursor with Open-Coordinated Ligands Oh, Seung Hoon; Hwang, Jeong Min; Park, Hyeonbin; Park, Dongseong; Song, Young Eun; Ko, Eun Chong; Park, Tae Joo; et al, ADVANCED MATERIALS INTERFACES, v.10, no.17, 2023-06 |
| Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications Lee, Young-Soo; Han, Ju-Hwan; Park, Jin-Seong; Park, Jozeph, Journal of Vacuum Science and Technology A, v.35, no.4, 2017-07 |
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