Browse "RIMS Collection" by Author Yoon J.-B.
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| A low-voltage two-axis electromagnetically actuated micromirror with bulk silicon mirror plates and torsion bars Cho I.-J.; Yun K.-S.; Lee H.; Yoon J.-B.; Yoon E., 15th IEEE International Conference on Micro Electro Mechanical Systems MEMS 2002, pp.540 - 543, 2002-01-20 |
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