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Amidoxime-Containing Ti Precursors for Atomic Layer Deposition of TiN Thin Films with Suppressed Columnar Microstructure Lee, Ga Yeon; Yeo, Seungmin; Cho, Chan-Mi; Oh, Seung Hoon; Park, Hyeonbin; Park, Bo Keun; Son, Seung Uk; et al, INORGANIC CHEMISTRY, v.62, no.11, pp.4680 - 4687, 2023-03 |
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