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Fabrication and Characterization of PECVD Si3N4 Diaphragm-Based Capacitive-type Acoustic Sensor for IoT Application Lee, Jaewoo; Yang, WS; Moon, SE; Lee, SG, 30th Eurosensors Conference, Eurosensors 2016, pp.749 - 752, Elsevier Ltd, 2016-09 |
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