Browse "RIMS Collection" by Author Yang, WS

Showing results 1 to 1 of 1

1
Fabrication and Characterization of PECVD Si3N4 Diaphragm-Based Capacitive-type Acoustic Sensor for IoT Application

Lee, Jaewoo; Yang, WS; Moon, SE; Lee, SG, 30th Eurosensors Conference, Eurosensors 2016, pp.749 - 752, Elsevier Ltd, 2016-09

Discover

Type

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0