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Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition Kim, ST; Kim, JW; Jung, SW; Shin, JS; Ahn, SungTae; Lee, Won-Jong, MATERIALS CHEMISTRY AND PHYSICS, v.45, no.2, pp.155 - 158, 1996-08 |
The effects of substrate temperature and lead precursor flow rate on the fabrication of (Pb,La)(Zr,Ti)O-3 thin films by electron cyclotron resonance plasma-enhanced chemical vapor deposition Shin, JS; Chun , Soung Soon; Lee, Won-Jong, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES REVIEW PAPERS, v.36, no.4A, pp.2200 - 2206, 1997-04 |
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