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1	A STUDY OF SILICON INTERSTITIAL KINETICS USING SILICON MEMBRANES - APPLICATIONS TO 2D DOPANT DIFFUSION Ahn, SungTae; GRIFFIN, PB; SHOTT, JD; PLUMMER, JD; TILLER, WA, JOURNAL OF APPLIED PHYSICS, v.62, no.12, pp.4745 - 4755, 1987-12

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