Browse "RIMS Collection" by Author Rha, Sa-Kyun

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Improved Copper chemical vapor deposition process by applying substrate bias

Lee, Won-Jun; Chun , Soung Soon; Rha, Sa-Kyun; Lee, Seung-Yun; Kim, Dong-Won; Park, Chong-Ook, JOURNAL OF THE AMERICAN CERAMIC SOCIETY, v.427, pp.207 - 212, 1996

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