Browse "RIMS Collection" by Author Park, Hyeonbin

Showing results 1 to 2 of 2

1
Amidoxime-Containing Ti Precursors for Atomic Layer Deposition of TiN Thin Films with Suppressed Columnar Microstructure

Lee, Ga Yeon; Yeo, Seungmin; Cho, Chan-Mi; Oh, Seung Hoon; Park, Hyeonbin; Park, Bo Keun; Son, Seung Uk; et al, INORGANIC CHEMISTRY, v.62, no.11, pp.4680 - 4687, 2023-03

2
Atomic Layer Deposition of Ru Thin Film Using a Newly Synthesized Precursor with Open-Coordinated Ligands

Oh, Seung Hoon; Hwang, Jeong Min; Park, Hyeonbin; Park, Dongseong; Song, Young Eun; Ko, Eun Chong; Park, Tae Joo; et al, ADVANCED MATERIALS INTERFACES, v.10, no.17, 2023-06

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