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STRUCTURAL AND OPTICAL-PROPERTIES OF MICROCRYSTALLINE SILICON FILMS DEPOSITED BY PLASMA-ENHANCED CHEMICAL-VAPOR-DEPOSITION

Moon, DG; Jung, BH; Lee, JN; Ahn, Byung Tae; Lim, Ho Bin; Nam, KS; Kang, SW, JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS, v.5, no.6, pp.364 - 369, 1994

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