Showing results 1 to 3 of 3
Direct Growing of Lightly Doped Epitaxial Silicon without Misfit Dislocation on Heavily Boron-Doped Silicon Layer H.J.Lee; C.S.Kim; C.H.Han; Kim, Choong Ki, APPLIED PHYSICS LETTERS, v.65, no.17, pp.2139 - 2141, 1994-10 |
Formation of Self-aligned Holes in an Arbitrary pattern in Silicon Substrate H.D.Lee; H.J.Lee; Kim, Choong Ki; C.H.Han, APPLIED PHYSICS LETTERS, v.66, no.24, pp.3272 - 3274, 1995-06 |
Heavily Boron-Doped Silicon Membranes with Enhanced Mechanical Properties for X-Ray Mask Substrates H.J.Lee; C.H.Han; Kim, Choong Ki, APPLIED PHYSICS LETTERS, v.65, no.11, pp.1385 - 1387, 1994-09 |
Discover