Browse "RIMS Collection" by Author C.-C King

Showing results 1 to 1 of 1

1
Thin Oxide Charging Current During Plasma Etching of Aluminum

H. Shin; C.-C King; T. Horiuchi; C. Hu, IEEE ELECTRON DEVICE LETTERS, v.12, no.8, pp.404 - 406, 1991-08

Discover

Type

Open Access

Date issued

. next

Subject

. next

rss_1.0 rss_2.0 atom_1.0