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Browse "RIMS Collection" by Author Ahn, SungTae

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Showing results 1 to 5 of 5

1	A STAINING TECHNIQUE FOR THE STUDY OF TWO-DIMENSIONAL DOPANT DIFFUSION IN SILICON Ahn, SungTae; TILLER, WA, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.135, no.9, pp.2370 - 2373, 1988-09
2	A STUDY OF SILICON INTERSTITIAL KINETICS USING SILICON MEMBRANES - APPLICATIONS TO 2D DOPANT DIFFUSION Ahn, SungTae; GRIFFIN, PB; SHOTT, JD; PLUMMER, JD; TILLER, WA, JOURNAL OF APPLIED PHYSICS, v.62, no.12, pp.4745 - 4755, 1987-12
3	ENHANCED SB DIFFUSION IN SI UNDER THERMAL SI3N4 FILMS DURING ANNEALING IN AR Ahn, SungTae; KENNEL, HW; PLUMMER, JD; TILLER, WA, APPLIED PHYSICS LETTERS, v.53, no.17, pp.1593 - 1595, 1988-10
4	FILM STRESS-RELATED VACANCY SUPERSATURATION IN SILICON UNDER LOW-PRESSURE CHEMICAL VAPOR-DEPOSITED SILICON-NITRIDE FILMS Ahn, SungTae; KENNEL, HW; PLUMMER, JD; TILLER, WA, JOURNAL OF APPLIED PHYSICS, v.64, no.10, pp.4914 - 4919, 1988-11
5	REDUCTION OF LATERAL PHOSPHORUS DIFFUSION IN CMOS NORMAL-WELLS Ahn, SungTae; KENNEL, HW; PLUMMER, JD; TILLER, WA, IEEE TRANSACTIONS ON ELECTRON DEVICES, v.37, no.3, pp.806 - 807, 1990-03

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