Browse "RIMS Collection" by Subject AL2O3
Showing results 2 to 3 of 3
| Low temperature SiOx thin film deposited by plasma enhanced atomic layer deposition for thin film encapsulation applications Lee, Young-Soo; Han, Ju-Hwan; Park, Jin-Seong; Park, Jozeph, Journal of Vacuum Science and Technology A, v.35, no.4, 2017-07 |
| Systematic Investigation of Growth and Properties of Ga2O3 Films on C-Plane Sapphire Substrates Prepared by Plasma-Assisted Molecular Beam Epitaxy Ngo, Trong Si; Le, Due Duy; Vuong, Nguyen Quoc; Hong, Soon-Ku, ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY, v.11, no.3, 2022-03 |
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