Browse "RIMS Collection" by Subject E-beam lithography

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Lateral Silicon Field-Emission Devices Using Electron Beam Lithography

sangyeon han; sun-a yang; taekeun hwang; jongho lee; jong duk lee; hyungcheol shin, JAPANESE JOURNAL OF APPLIED PHYSICS PART 1, v.39, no.5A, pp.2556 - 2559, 2000-05

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