Browse "RIMS Collection" by Author nae-in lee
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| Highly reliable ECR N2O-plasma polyoxide grown on heavily phosphorus-doped polysilicon films nae-in lee; jin-woo lee; chul-hi han, JOURNAL OF ELECTRONIC MATERIALS, v.28, no.12, pp.L31 - L33, 1999 |
| Oxidation of Silicon Using Electron Cyclotron Resonance Nitrous Oxide Plasma and Its Application to Polycrystalline Silicon Thin Film Transistors jin-woo lee; nae-in lee; sung-hoi hur; chul-hi han, JOURNAL OF THE ELECTROCHEMICAL SOCIETY, v.144, no.9, pp.3283 - 3287, 1997-09 |
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