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The growth behavior and properties of atomic layer deposited zinc oxide films using hydrogen peroxide (H2O2) and ozone (O-3) oxidants

Park, J.; Jung, Tae-Hoon; Lee, Jung-Hoon; Kim, Hyun-Suk; Park, Jin-Seong, CERAMICS INTERNATIONAL, v.41, no.1, pp.1839 - 1845, 2015-01

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