DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Lee, Byung-Kee | ko |
dc.contributor.author | Choi, Dong-Hoon | ko |
dc.contributor.author | Yang, Hyun-Ho | ko |
dc.date.accessioned | 2017-12-20T11:17:19Z | - |
dc.date.available | 2017-12-20T11:17:19Z | - |
dc.date.issued | 2013-05-21 | - |
dc.identifier.uri | http://hdl.handle.net/10203/233773 | - |
dc.description.abstract | Disclosed is a method for manufacturing 3-dimensional structure using a thin film with a columnar nano pores and a manufacture thereof. A method for packaging an MEMS device or an NEMS device in accordance with an embodiment of the present invention includes: forming a sacrificial layer; forming a thin film having columnar nano pores formed therein by depositing one of a metallic material, an oxide, a nitride and a fluoride on the sacrificial layer; forming a support layer on the thin film and patterning the support layer; removing the sacrificial layer through use of the nano pores of the thin film parts of which are exposed by patterning the support layer; and forming a shielding layer on the thin film and the support layer. | - |
dc.title | METHOD FOR MANUFACTURING 3-DIMENSIONAL STRUCTURES USING THIN FILM WITH COLUMNAR NANO PORES AND MANUFACTURE THEREOF | - |
dc.title.alternative | 원주상 구조의 나노 기공이 형성된 박막을 이용한 3차원 구조체의 제조방법 및 그 제조물 | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Lee, Byung-Kee | - |
dc.contributor.nonIdAuthor | Yang, Hyun-Ho | - |
dc.contributor.assignee | KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 12992555 | - |
dc.identifier.patentRegistrationNumber | 8,445,305 | - |
dc.date.application | 2010-05-28 | - |
dc.date.registration | 2013-05-21 | - |
dc.publisher.country | US | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.