마이크로 펌프 및 그 구동 방법

Abstract

A micropump includes: a fluid suction tube for suctioning fluid; a pumping tube connected to the fluid suction tube and providing a suction force and a discharge force to surroundings while repeatedly being expanded and contracted by an external signal; a deform tube connected to the pumping tube and having an aperture that is deformed by the suction force and the discharge force of the pumping tube; and a fluid discharge tube connected to the deform tube and discharging fluid.