DC Field | Value | Language |
---|---|---|
dc.contributor.author | Yoon, Jun-Bo | ko |
dc.contributor.author | Yang Hyun-Ho | ko |
dc.contributor.author | Choi Dong-Hoon | ko |
dc.date.accessioned | 2017-12-20T10:36:52Z | - |
dc.date.available | 2017-12-20T10:36:52Z | - |
dc.date.issued | 2012-02-21 | - |
dc.identifier.uri | http://hdl.handle.net/10203/232709 | - |
dc.description.abstract | The present invention relates to a micro-electromechanical system (MEMS) and, more particularly, to an electrostatic actuator, and a driving method thereof and an application device thereof. The electrostatic actuator in accordance with the present invention comprises a fixed electrode, an electric charge charging unit electrically insulated from the fixed electrode, and a moving electrode spaced apart from the fixed electrode and the electric charge charging unit. In accordance with the present invention, the electrostatic actuator with a very low driving voltage and an arbitrarily controllable driving voltage when compared with a conventional electrostatic actuator is provided. In addition, the electrostatic actuator having durability against external noise and enabling a reliable consecutive operation is provided. Further, in accordance with the present invention, non-volatile mechanical memory, a logic circuit and a switch employing the electrostatic actuator are provided. | - |
dc.title | Electrostatic actuator | - |
dc.type | Patent | - |
dc.type.rims | PAT | - |
dc.contributor.localauthor | Yoon, Jun-Bo | - |
dc.contributor.nonIdAuthor | Yang Hyun-Ho | - |
dc.contributor.nonIdAuthor | Choi Dong-Hoon | - |
dc.contributor.assignee | KAIST | - |
dc.identifier.iprsType | 특허 | - |
dc.identifier.patentApplicationNumber | 12091555 | - |
dc.identifier.patentRegistrationNumber | 8120451 | - |
dc.date.application | 2008-03-06 | - |
dc.date.registration | 2012-02-21 | - |
dc.publisher.country | US | - |
Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.