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College of Natural Sciences(자연과학대학)Dept. of Physics(물리학과)PH-Journal Papers(저널논문)

FABRICATION OF INGAAS/INP AVALANCHE PHOTODIODES BY REACTIVE ION ETCHING USING CH4/H-2 GASES

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dc.contributor.authorPARK, CYko
dc.contributor.authorYOO, JBko
dc.contributor.authorPARK, Cko
dc.contributor.authorHYUN, KSko
dc.contributor.authorOH, DKko
dc.contributor.authorLee, Yong-Heeko
dc.contributor.authorLEE, Cko
dc.contributor.authorPARK, HMko
dc.date.accessioned2011-04-07T07:38:57Z-
dc.date.available2011-04-07T07:38:57Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued1995-
dc.identifier.citationJOURNAL OF VACUUM SCIENCE TECHNOLOGY B, v.13, no.3, pp.974 - 977-
dc.identifier.issn1071-1023-
dc.identifier.urihttp://hdl.handle.net/10203/23223-
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherAMER INST PHYSICS-
dc.subjectBURIED-HETEROSTRUCTURE LASER-
dc.subjectCHEMICAL VAPOR-DEPOSITION-
dc.subjectGAIN-BANDWIDTH PRODUCT-
dc.subjectINP-
dc.subjectHYDROGEN-
dc.subjectPHOTODETECTORS-
dc.subjectPASSIVATION-
dc.subjectACCEPTORS-
dc.subjectMETHANE-
dc.titleFABRICATION OF INGAAS/INP AVALANCHE PHOTODIODES BY REACTIVE ION ETCHING USING CH4/H-2 GASES-
dc.typeArticle-
dc.identifier.wosidA1995RD49400027-
dc.identifier.scopusid2-s2.0-0029307753-
dc.type.rimsART-
dc.citation.volume13-
dc.citation.issue3-
dc.citation.beginningpage974-
dc.citation.endingpage977-
dc.citation.publicationnameJOURNAL OF VACUUM SCIENCE TECHNOLOGY B-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorLee, Yong-Hee-
dc.contributor.nonIdAuthorPARK, CY-
dc.contributor.nonIdAuthorYOO, JB-
dc.contributor.nonIdAuthorPARK, C-
dc.contributor.nonIdAuthorHYUN, KS-
dc.contributor.nonIdAuthorOH, DK-
dc.contributor.nonIdAuthorPARK, HM-
dc.type.journalArticleArticle-
dc.subject.keywordPlusBURIED-HETEROSTRUCTURE LASER-
dc.subject.keywordPlusCHEMICAL VAPOR-DEPOSITION-
dc.subject.keywordPlusGAIN-BANDWIDTH PRODUCT-
dc.subject.keywordPlusINP-
dc.subject.keywordPlusHYDROGEN-
dc.subject.keywordPlusPHOTODETECTORS-
dc.subject.keywordPlusPASSIVATION-
dc.subject.keywordPlusACCEPTORS-
dc.subject.keywordPlusMETHANE-
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