SURFACE INSPECTION APPARATUS FOR SEMICONDUCTOR CHIPS반도체 칩류를 위한 표시 검사 장치

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dc.contributor.author손훈ko
dc.contributor.author안윤규ko
dc.contributor.author양진열ko
dc.contributor.author황순규ko
dc.contributor.author문연조ko
dc.contributor.author김상영ko
dc.contributor.author하승원ko
dc.contributor.author조성일ko
dc.date.accessioned2017-12-20T00:42:05Z-
dc.date.available2017-12-20T00:42:05Z-
dc.date.issued2016-11-22-
dc.identifier.urihttp://hdl.handle.net/10203/228712-
dc.description.abstractA surface inspection apparatus and method of inspecting chip surfaces includes a laser generator that generates a periodic CW laser and is transformed into an inspection laser beam having a beam size smaller than a surface size of the chip. Thus, the inspection laser beam is irradiated onto a plurality of the semiconductor chips such that the semiconductor chips are partially and simultaneously heated. Thermal waves are detected in response to the inspection laser beam and thermal images are generated corresponding to the thermal waves. A surface image is generated by a lock-in thermography technique and hold exponent analysis of the thermal image, thereby generating surface image in which a surface defect is included. Time and accuracy of the surface inspection process is improved.-
dc.titleSURFACE INSPECTION APPARATUS FOR SEMICONDUCTOR CHIPS-
dc.title.alternative반도체 칩류를 위한 표시 검사 장치-
dc.typePatent-
dc.type.rimsPAT-
dc.contributor.localauthor손훈-
dc.contributor.nonIdAuthor양진열-
dc.contributor.nonIdAuthor황순규-
dc.contributor.nonIdAuthor문연조-
dc.contributor.nonIdAuthor김상영-
dc.contributor.nonIdAuthor하승원-
dc.contributor.nonIdAuthor조성일-
dc.contributor.assigneeKAIST-
dc.identifier.iprsType특허-
dc.identifier.patentApplicationNumber14603809-
dc.identifier.patentRegistrationNumber9500599-
dc.date.application2015-01-23-
dc.date.registration2016-11-22-
dc.publisher.countryUS-
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CE-Patent(특허)
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