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Method of fabrication and control of nano-structure array by angle-resolved exposure in proximity-field nano patterning Jeon, Seokwoo; Nam, Sang Hyeon; Lee, Jisun |
Methods of forming a pattern and methods of fabricating a semiconductor device having a pattern Yoon, Dong Ki; Yi, Shiyong; Kim, Kyoungseon; Choi, Seongwoon; Oh, Seokhwan; Kim, Sang Ouk; Park, Seung Hak |
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