DSpace at KOASAS
College of Engineering(공과대학)School of Electrical Engineering(전기및전자공학부)EE-Conference Papers(학술회의논문)

Plasma-Enhanced Atomic Layer Deposition of Uniform Hexagonal Boron Nitride Films

Cited 0 time in webofscience Cited 0 time in scopus
  • Hit : 176
  • Download : 0
Export
DC FieldValueLanguage
dc.contributor.authorPark, Haminko
dc.contributor.authorKim, Tae Keunko
dc.contributor.authorCho, Sung Wooko
dc.contributor.authorJang, Hong Seokko
dc.contributor.authorLee, Sang Ickko
dc.contributor.authorChoi, Sung-Yoolko
dc.date.accessioned2017-09-25T02:43:41Z-
dc.date.available2017-09-25T02:43:41Z-
dc.date.created2017-09-11-
dc.date.created2017-09-11-
dc.date.created2017-09-11-
dc.date.issued2017-04-20-
dc.identifier.citationMRS SPRING MEETING 2017-
dc.identifier.urihttp://hdl.handle.net/10203/225903-
dc.languageEnglish-
dc.publisherMRS SPRING MEETING 2017-
dc.titlePlasma-Enhanced Atomic Layer Deposition of Uniform Hexagonal Boron Nitride Films-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationnameMRS SPRING MEETING 2017-
dc.identifier.conferencecountryUS-
dc.identifier.conferencelocationPhoenix Convention Center & Sheraton Grand Phoenix-
dc.contributor.localauthorChoi, Sung-Yool-
dc.contributor.nonIdAuthorKim, Tae Keun-
dc.contributor.nonIdAuthorCho, Sung Woo-
dc.contributor.nonIdAuthorJang, Hong Seok-
dc.contributor.nonIdAuthorLee, Sang Ick-
Appears in Collection
EE-Conference Papers(학술회의논문)
Files in This Item
There are no files associated with this item.

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0