DC Field | Value | Language |
---|---|---|
dc.contributor.author | Shim, Seongbo | ko |
dc.contributor.author | Cai, Sibo | ko |
dc.contributor.author | Yang, Seunghune | ko |
dc.contributor.author | Choi, Jungdal | ko |
dc.contributor.author | Shin, Youngsoo | ko |
dc.date.accessioned | 2017-08-16T08:50:00Z | - |
dc.date.available | 2017-08-16T08:50:00Z | - |
dc.date.created | 2014-11-26 | - |
dc.date.created | 2014-11-26 | - |
dc.date.created | 2014-11-26 | - |
dc.date.issued | 2015-02-26 | - |
dc.identifier.citation | Conference on Alternative Lithographic Technologies VII | - |
dc.identifier.issn | 0277-786X | - |
dc.identifier.uri | http://hdl.handle.net/10203/225313 | - |
dc.description.abstract | Verification of full-chip DSA guide patterns (GPs) through simulations is not practical due to long runtime. We develop a decision function (or functions), which receives n geometry parameters of a GP as inputs and predicts whether the GP faithfully produces desired contacts (good) or not (bad). We take a few sample GPs to construct the function; DSA simulations are performed for each GP to decide whether it is good or bad, and the decision is marked in n-dimensional space. The hyper-plane that separates good marks and bad marks in that space is determined through machine learning process, and corresponds to our decision function. We try a single global function that can be applied to any GP types, and a series of functions in which each function is customized for different GP type; they are then compared and assessed in 10nm technology. | - |
dc.language | English | - |
dc.publisher | SPIE | - |
dc.title | Verification of Directed Self-Assembly (DSA) Guide Patterns through Machine Learning | - |
dc.type | Conference | - |
dc.identifier.wosid | 000354204900035 | - |
dc.identifier.scopusid | 2-s2.0-84931438657 | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | Conference on Alternative Lithographic Technologies VII | - |
dc.identifier.conferencecountry | US | - |
dc.identifier.conferencelocation | San Jose Convention Center | - |
dc.identifier.doi | 10.1117/12.2085644 | - |
dc.contributor.localauthor | Shin, Youngsoo | - |
dc.contributor.nonIdAuthor | Cai, Sibo | - |
dc.contributor.nonIdAuthor | Yang, Seunghune | - |
dc.contributor.nonIdAuthor | Choi, Jungdal | - |
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