Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 안현준 | ko |
| dc.contributor.author | 문정민 | ko |
| dc.contributor.author | 김용준 | ko |
| dc.contributor.author | 노일철 | ko |
| dc.contributor.author | 김춘환 | ko |
| dc.contributor.author | 조병진 | ko |
| dc.date.accessioned | 2017-07-03T07:00:53Z | - |
| dc.date.available | 2017-07-03T07:00:53Z | - |
| dc.date.created | 2017-06-22 | - |
| dc.date.created | 2017-06-22 | - |
| dc.date.issued | 2017-02-14 | - |
| dc.identifier.citation | 24th Korean Conference on Semiconductors | - |
| dc.identifier.uri | http://hdl.handle.net/10203/224405 | - |
| dc.language | English | - |
| dc.publisher | SK Hynix | - |
| dc.title | Investigation of ALD-Ni as P type Work function Metal Electrode on High-k dielectrics | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 24th Korean Conference on Semiconductors | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 강원도 대명 비발디 파크 | - |
| dc.contributor.localauthor | 조병진 | - |
| dc.contributor.nonIdAuthor | 노일철 | - |
| dc.contributor.nonIdAuthor | 김춘환 | - |
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