DSpace at KOASAS
College of Engineering(공과대학)Dept. of Materials Science and Engineering(신소재공학과)MS-Journal Papers(저널논문)

Evolution of grain structure of as-deposited Cr thin films with deposition temperature

Cited 9 time in webofscience Cited 0 time in scopus
  • Hit : 787
  • Download : 32
Export
DC FieldValueLanguage
dc.contributor.authorPark, Joong Keunko
dc.contributor.authorKim, JHko
dc.contributor.authorPark, SIko
dc.contributor.authorLee, HyuckMoko
dc.contributor.authorOh, DYko
dc.date.accessioned2007-11-29T06:59:21Z-
dc.date.available2007-11-29T06:59:21Z-
dc.date.created2012-02-06-
dc.date.created2012-02-06-
dc.date.issued2003-04-
dc.identifier.citationSCRIPTA MATERIALIA, v.48, no.8, pp.1161 - 1166-
dc.identifier.issn1359-6462-
dc.identifier.urihttp://hdl.handle.net/10203/2224-
dc.description.abstractThe growth of Cr thin films prepared by DC-magnetron sputter deposition was investigated by measuring the evolution of the grain size distribution and by computing the film growth using Monte Carlo simulation. The variation of grain size distribution with the deposition temperature is analyzed in terms of the film growth mechanisms. (C) 2003 Acta Materialia Inc. Published by Elsevier Science Ltd. All rights reserved.-
dc.description.sponsorshipThe authors are grateful to the Ministry of Science and Technology, Korea for the financial support of this research through the Nanostructure Technology Project.en
dc.languageEnglish-
dc.language.isoen_USen
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD-
dc.subjectGROWTH-
dc.titleEvolution of grain structure of as-deposited Cr thin films with deposition temperature-
dc.typeArticle-
dc.identifier.wosid000181726000030-
dc.identifier.scopusid2-s2.0-0037437265-
dc.type.rimsART-
dc.citation.volume48-
dc.citation.issue8-
dc.citation.beginningpage1161-
dc.citation.endingpage1166-
dc.citation.publicationnameSCRIPTA MATERIALIA-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthorPark, Joong Keun-
dc.contributor.localauthorLee, HyuckMo-
dc.contributor.nonIdAuthorKim, JH-
dc.contributor.nonIdAuthorPark, SI-
dc.contributor.nonIdAuthorOh, DY-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorthin film-
dc.subject.keywordAuthorphysical vapor deposition-
dc.subject.keywordAuthorgrain growth-
dc.subject.keywordAuthorlognormal distribution-
dc.subject.keywordAuthorMonte Carlo simulation-
dc.subject.keywordPlusGROWTH-
Appears in Collection
MS-Journal Papers(저널논문)
Files in This Item
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 9 items in WoS Click to see citing articles in records_button

Display Simple Item Record

qr_code

  • mendeley

    citeulike

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.


rss_1.0 rss_2.0 atom_1.0