Repeating resonant lissajous fiber scanning probe for high speed laser scanning endomicroscopy

Abstract

This research suggests repeating resonant Lissajous fiber scanning probe for the high speed laser scanning endomicroscopy at the first time. Repeating Lissajous scanner can satisfy maximum sampling density at every frame. In this research, target frame rate was 10 and target scanning density was above 80 %. The Lissajous resonant fiber scanner is inspired from resonant frequency modulation using micro-tethered-silicon-oscillator (MTSO). Design parameters are fiber length, mass structure, MTSO’s location, and MTSO’s length. To fabricate precise MTSO, silicon microfabrication process applied to fabricate the MTSO using deep reactive ion etching (DRIE). The repeating Lissajous resonant fiber scanner shows 10 frame rate repeating Lissajous pattern without mechanical coupling phenomenon. The fabricated fiber scanner was fully packaged with 30 mm long, 2.6 mm diameter, and total weight of 0.3 g. The repeating resonant Lissajous fiber scanning probe successfully combined to the confocal imaging system, and 2D reflectance images were obtained. This fabricated probe can provide a new direction for high speed and high resolution Lissajous pattern application in real-time in-vivo imaging.