DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, J | ko |
dc.contributor.author | Shin, H | ko |
dc.contributor.author | Kim, S | ko |
dc.contributor.author | Hong, S | ko |
dc.contributor.author | Chung, J | ko |
dc.contributor.author | Park, H | ko |
dc.contributor.author | Moon, J | ko |
dc.date.accessioned | 2017-02-02T01:59:51Z | - |
dc.date.available | 2017-02-02T01:59:51Z | - |
dc.date.created | 2017-01-17 | - |
dc.date.created | 2017-01-17 | - |
dc.date.issued | 2003-10 | - |
dc.identifier.citation | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.42, no.10A, pp.L1171 - L1174 | - |
dc.identifier.issn | 0021-4922 | - |
dc.identifier.uri | http://hdl.handle.net/10203/220319 | - |
dc.description.abstract | Microfabrication processes of atomic force microscope (AFM) probe using SU-8 photoresist have been developed. Photolithographic patterning of the SU-8 on the anisotropically etched Si substrate produced the AFM cantilever with integrated tip. Use of the self-assembled monolayers and Al interlayer between the SU-8 and the Si substrate played a significant role for retrieving the probe out of the Si micromold without any damage. Fabricated SU-8 probe with a relatively sharp tip (radius of curvature similar to80 nm) had a resonant frequency of 44 kHz, which yields a spring constant of 0.248 N/m. | - |
dc.language | English | - |
dc.publisher | INST PURE APPLIED PHYSICS | - |
dc.subject | SELF-ASSEMBLED MONOLAYER | - |
dc.subject | DATA-STORAGE | - |
dc.subject | MEMS | - |
dc.subject | MICROFABRICATION | - |
dc.subject | WATER | - |
dc.subject | DNA | - |
dc.title | Fabrication of atomic force microscope probe with low spring constant using SU-8 photoresist | - |
dc.type | Article | - |
dc.identifier.wosid | 000186948000020 | - |
dc.type.rims | ART | - |
dc.citation.volume | 42 | - |
dc.citation.issue | 10A | - |
dc.citation.beginningpage | L1171 | - |
dc.citation.endingpage | L1174 | - |
dc.citation.publicationname | JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | - |
dc.identifier.doi | 10.1143/JJAP.42.L1171 | - |
dc.contributor.localauthor | Hong, S | - |
dc.contributor.nonIdAuthor | Lee, J | - |
dc.contributor.nonIdAuthor | Shin, H | - |
dc.contributor.nonIdAuthor | Kim, S | - |
dc.contributor.nonIdAuthor | Chung, J | - |
dc.contributor.nonIdAuthor | Park, H | - |
dc.contributor.nonIdAuthor | Moon, J | - |
dc.description.isOpenAccess | N | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | AFM | - |
dc.subject.keywordAuthor | cantilever | - |
dc.subject.keywordAuthor | SU-8 | - |
dc.subject.keywordAuthor | SAMs | - |
dc.subject.keywordAuthor | spring constant | - |
dc.subject.keywordPlus | SELF-ASSEMBLED MONOLAYER | - |
dc.subject.keywordPlus | DATA-STORAGE | - |
dc.subject.keywordPlus | MEMS | - |
dc.subject.keywordPlus | MICROFABRICATION | - |
dc.subject.keywordPlus | WATER | - |
dc.subject.keywordPlus | DNA | - |
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