Fabrication of atomic force microscope probe with low spring constant using SU-8 photoresist

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dc.contributor.authorLee, Jko
dc.contributor.authorShin, Hko
dc.contributor.authorKim, Sko
dc.contributor.authorHong, Sko
dc.contributor.authorChung, Jko
dc.contributor.authorPark, Hko
dc.contributor.authorMoon, Jko
dc.date.accessioned2017-02-02T01:59:51Z-
dc.date.available2017-02-02T01:59:51Z-
dc.date.created2017-01-17-
dc.date.created2017-01-17-
dc.date.issued2003-10-
dc.identifier.citationJAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, v.42, no.10A, pp.L1171 - L1174-
dc.identifier.issn0021-4922-
dc.identifier.urihttp://hdl.handle.net/10203/220319-
dc.description.abstractMicrofabrication processes of atomic force microscope (AFM) probe using SU-8 photoresist have been developed. Photolithographic patterning of the SU-8 on the anisotropically etched Si substrate produced the AFM cantilever with integrated tip. Use of the self-assembled monolayers and Al interlayer between the SU-8 and the Si substrate played a significant role for retrieving the probe out of the Si micromold without any damage. Fabricated SU-8 probe with a relatively sharp tip (radius of curvature similar to80 nm) had a resonant frequency of 44 kHz, which yields a spring constant of 0.248 N/m.-
dc.languageEnglish-
dc.publisherINST PURE APPLIED PHYSICS-
dc.subjectSELF-ASSEMBLED MONOLAYER-
dc.subjectDATA-STORAGE-
dc.subjectMEMS-
dc.subjectMICROFABRICATION-
dc.subjectWATER-
dc.subjectDNA-
dc.titleFabrication of atomic force microscope probe with low spring constant using SU-8 photoresist-
dc.typeArticle-
dc.identifier.wosid000186948000020-
dc.type.rimsART-
dc.citation.volume42-
dc.citation.issue10A-
dc.citation.beginningpageL1171-
dc.citation.endingpageL1174-
dc.citation.publicationnameJAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS-
dc.identifier.doi10.1143/JJAP.42.L1171-
dc.contributor.localauthorHong, S-
dc.contributor.nonIdAuthorLee, J-
dc.contributor.nonIdAuthorShin, H-
dc.contributor.nonIdAuthorKim, S-
dc.contributor.nonIdAuthorChung, J-
dc.contributor.nonIdAuthorPark, H-
dc.contributor.nonIdAuthorMoon, J-
dc.description.isOpenAccessN-
dc.type.journalArticleArticle-
dc.subject.keywordAuthorAFM-
dc.subject.keywordAuthorcantilever-
dc.subject.keywordAuthorSU-8-
dc.subject.keywordAuthorSAMs-
dc.subject.keywordAuthorspring constant-
dc.subject.keywordPlusSELF-ASSEMBLED MONOLAYER-
dc.subject.keywordPlusDATA-STORAGE-
dc.subject.keywordPlusMEMS-
dc.subject.keywordPlusMICROFABRICATION-
dc.subject.keywordPlusWATER-
dc.subject.keywordPlusDNA-
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