High-Speed Mechanically Flexible Single-Crystal Silicon Thin-Film Transistors on Plastic Substrates

Abstract

This letter describes the fabrication and properties of bendable single-crystal-silicon thin film transistors formed on plastic substrates. These devices use ultrathin single-crystal silicon ribbons for the semiconductor, with optimized device layouts and low-temperature gate dielectrics. The level of performance that can be achieved approaches that of traditional silicon transistors on rigid bulk wafers: effective mobilities > 500 cm(2)/V(.)s, ON/OFF ratios > 10(5), and response frequencies > 500 MHz at channel lengths of 2 mu m. This type of device might provide a promising route to flexible digital circuits for classes of applications whose performance requirements cannot be satisfied with organic semiconductors, amorphous silicon, or other related approaches.