DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Hee Chul | - |
dc.contributor.author | Shin, Young Bong | - |
dc.contributor.author | Kang, In Ku | - |
dc.date.accessioned | 2017-01-13T07:46:02Z | - |
dc.date.available | 2017-01-13T07:46:02Z | - |
dc.date.created | 2016-12-29 | - |
dc.date.issued | 2016-04-08 | - |
dc.identifier.citation | 한국MEMS학술대회 | - |
dc.identifier.uri | http://hdl.handle.net/10203/219092 | - |
dc.language | Korean | - |
dc.publisher | 마이크로나노시스템학회 | - |
dc.title | 스퍼터링 방식으로 제작된 적외선 방사체 소자용 TiNx 박막의 공정압력에 따른 구조적, 전기적 특성 분석 | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 한국MEMS학술대회 | - |
dc.identifier.conferencecountry | KO | - |
dc.identifier.conferencelocation | 제주 KAL 호텔 | - |
dc.contributor.localauthor | Lee, Hee Chul | - |
dc.contributor.localauthor | Shin, Young Bong | - |
dc.contributor.localauthor | Kang, In Ku | - |
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