EFFECT OF OXYGEN PRECIPITATION ON PHOSPHORUS DIFFUSION IN CZOCHRALSKI SILICON
- Publisher
- AMER INST PHYSICS
- Issue Date
- 1988-07
- Language
- English
- Article Type
- Article
- Citation
APPLIED PHYSICS LETTERS, v.53, no.1, pp.34 - 36
- ISSN
- 0003-6951
- Appears in Collection
- RIMS Journal Papers
- Files in This Item
- There are no files associated with this item.
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