전력 분야로의 응용을 위한 신뢰적인 정전구동 MEMS 스위치HIGHLY RELIABLE MEMS RELAY WITH TWO-STEP SPRING SYSTEM AND HEAT SINK INSULATOR FOR POWER APPLICATIONS

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DC FieldValueLanguage
dc.contributor.author윤용훈ko
dc.contributor.author송용하ko
dc.contributor.author고승덕ko
dc.contributor.author한창훈ko
dc.contributor.author윤건식ko
dc.contributor.author서민호ko
dc.contributor.author윤준보ko
dc.date.accessioned2016-07-13T03:52:10Z-
dc.date.available2016-07-13T03:52:10Z-
dc.date.created2015-12-28-
dc.date.issued2015-04-03-
dc.identifier.citation제17회 한국MEMS학술대회-
dc.identifier.urihttp://hdl.handle.net/10203/211096-
dc.description.abstractThis paper reports remarkably reliable MEMS relays having a unique two-step spring system and a heat sink insulator. The two-step spring system is designed to reduce Joule-heating by lowering contact resistance. The heat sink insulator is proposed for efficiently removing heat generated in the contact area. These two features are firstly adopted in the MEMS relay for minimizing thermal damage in high current level, thus enhancing reliability significantly. The fabricated relay demonstrated contact resistance of 2 mΩ, which is the lowest value compared to the state-of-the-art [11]. In addition, the relay was operated up to 5.3x106 cycles at 1 V/200 mA in an air and hot switching condition with negligible contact resistance variation. The resulting lifetime is 500 times longer than that of the commercial MEMS relay measured in the same test setup.-
dc.languageKorean-
dc.publisher마이크로나노시스템학회-
dc.title전력 분야로의 응용을 위한 신뢰적인 정전구동 MEMS 스위치-
dc.title.alternativeHIGHLY RELIABLE MEMS RELAY WITH TWO-STEP SPRING SYSTEM AND HEAT SINK INSULATOR FOR POWER APPLICATIONS-
dc.typeConference-
dc.type.rimsCONF-
dc.citation.publicationname제17회 한국MEMS학술대회-
dc.identifier.conferencecountryKO-
dc.identifier.conferencelocation제주 KAL 호텔-
dc.embargo.liftdate9999-12-31-
dc.embargo.terms9999-12-31-
dc.contributor.localauthor윤준보-
dc.contributor.nonIdAuthor윤건식-
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EE-Conference Papers(학술회의논문)
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