Photosensitive Metamaterial with Superlensing Effect for 100nm UV Nanolithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 이영섭 | ko |
| dc.contributor.author | 정기훈 | ko |
| dc.contributor.author | 박상길 | ko |
| dc.contributor.author | 전상철 | ko |
| dc.contributor.author | 유석재 | ko |
| dc.contributor.author | 박규환 | ko |
| dc.date.accessioned | 2016-07-13T03:50:48Z | - |
| dc.date.available | 2016-07-13T03:50:48Z | - |
| dc.date.created | 2016-01-04 | - |
| dc.date.issued | 2015-04-04 | - |
| dc.identifier.citation | 제17회 KMEMS 2015 학술대회 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/211082 | - |
| dc.language | English | - |
| dc.publisher | (사)마이크로나노시스템학회 | - |
| dc.title | Photosensitive Metamaterial with Superlensing Effect for 100nm UV Nanolithography | - |
| dc.type | Conference | - |
| dc.type.rims | CONF | - |
| dc.citation.publicationname | 제17회 KMEMS 2015 학술대회 | - |
| dc.identifier.conferencecountry | KO | - |
| dc.identifier.conferencelocation | 제주 KAL 호텔 | - |
| dc.contributor.localauthor | 정기훈 | - |
| dc.contributor.nonIdAuthor | 이영섭 | - |
| dc.contributor.nonIdAuthor | 박상길 | - |
| dc.contributor.nonIdAuthor | 전상철 | - |
| dc.contributor.nonIdAuthor | 유석재 | - |
| dc.contributor.nonIdAuthor | 박규환 | - |
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