DC Field | Value | Language |
---|---|---|
dc.contributor.author | 임태우 | ko |
dc.contributor.author | 양동열 | ko |
dc.date.accessioned | 2016-07-04T02:03:30Z | - |
dc.date.available | 2016-07-04T02:03:30Z | - |
dc.date.created | 2016-04-25 | - |
dc.date.created | 2016-04-25 | - |
dc.date.issued | 2015-10 | - |
dc.identifier.citation | 설비공학 논문집, v.27, no.10, pp.552 - 557 | - |
dc.identifier.issn | 1229-6422 | - |
dc.identifier.uri | http://hdl.handle.net/10203/208855 | - |
dc.description.abstract | The nanostereolithography process using a femtosecond laser has been shown to have strong merits for the direct fabrication of 2D/3D micro structures. In addition, a femtosecond laser provides efficient tools for precise micromachining owing to the advantages of a small and feeble heat effect zone. In this paper, we report an effective fabrication process of 3D micro optical and fluidic devices using nanostereolithography process composed of a dual stage system. Process conditions for additive and subtractive fabrication are examined. The Piezo stage scanning system is used for 3D micro-fabrication in unit area of sub-mm scale, and the motor stage is employed in fabrication on the scale of several mm. The misalignment between the pizeo- and motor- stages is revised through rotational transformation of CAD data in the unit domain. Here, the effectiveness of the proposed process is demonstrated through examples using 3D optical and microfluidic structures. | - |
dc.language | Korean | - |
dc.publisher | 대한설비공학회 | - |
dc.title | 이중 스테이지를 이용한 대면적 3차원 광/유체 마이크로 디바이스 제작에 관한 연구 | - |
dc.title.alternative | Fabrication of Three-Dimensional Micro Optical and Fluidic System Using Dual Stage Nanostereolithography Process | - |
dc.type | Article | - |
dc.type.rims | ART | - |
dc.citation.volume | 27 | - |
dc.citation.issue | 10 | - |
dc.citation.beginningpage | 552 | - |
dc.citation.endingpage | 557 | - |
dc.citation.publicationname | 설비공학 논문집 | - |
dc.identifier.doi | 10.6110/KJACR.2015.27.10.552 | - |
dc.identifier.kciid | ART002040075 | - |
dc.contributor.localauthor | 양동열 | - |
dc.subject.keywordAuthor | Femtosecond laser(펨토초레이저) | - |
dc.subject.keywordAuthor | 3D microstructure(3차원 마이크로형상) | - |
dc.subject.keywordAuthor | Dual Stage(이중스테이지) | - |
dc.subject.keywordAuthor | Two-photon polymerization(이광자흡수 광경화) | - |
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