DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jae Woo | ko |
dc.contributor.author | Jeon, J. H. | ko |
dc.contributor.author | Kim, Y. G. | ko |
dc.contributor.author | Lee, S. Q. | ko |
dc.contributor.author | Yang, W. S. | ko |
dc.contributor.author | Lee, Jungsoo | ko |
dc.contributor.author | Lee, Sang-Gug | ko |
dc.date.accessioned | 2016-06-29T02:04:44Z | - |
dc.date.available | 2016-06-29T02:04:44Z | - |
dc.date.created | 2016-04-12 | - |
dc.date.created | 2016-04-12 | - |
dc.date.issued | 2016-03 | - |
dc.identifier.citation | ELECTRONICS LETTERS, v.52, no.6, pp.468 - 469 | - |
dc.identifier.issn | 0013-5194 | - |
dc.identifier.uri | http://hdl.handle.net/10203/208471 | - |
dc.description.abstract | A capacitive-type MEMS acoustic sensor with a planarised TiN/plasma-enhanced chemical vapour deposition -Si3N4/TiN diaphragm based on a polyimide sacrificial layer is presented. The multi-layer diaphragm has the effective residual stress of +31.5 MPa. Furthermore, this sensor features a 21% lower parasitic capacitance and a 56% lower air-gap resistance in comparison with those of a sensor fabricated without planarisation. Five photomasks were used. In addition, to evaluate the frequency response, both an effective capacitance model and an equivalent circuit model equipped with a voltage-controlled voltage source are newly proposed and compared with conventional models. The open-circuit sensitivity is modelled to -45.4 dBV/Pa at 1 kHz with 9.6 V, indicating a difference of 0.9 dB in comparison with the open-circuit sensitivity of the conventional model | - |
dc.language | English | - |
dc.publisher | INST ENGINEERING TECHNOLOGY-IET | - |
dc.subject | MICROPHONE | - |
dc.title | TiN/PECVD-Si3N4/TiN diaphragm-based capacitive-type MEMS acoustic sensor | - |
dc.type | Article | - |
dc.identifier.wosid | 000371860000031 | - |
dc.identifier.scopusid | 2-s2.0-84960881724 | - |
dc.type.rims | ART | - |
dc.citation.volume | 52 | - |
dc.citation.issue | 6 | - |
dc.citation.beginningpage | 468 | - |
dc.citation.endingpage | 469 | - |
dc.citation.publicationname | ELECTRONICS LETTERS | - |
dc.identifier.doi | 10.1049/el.2015.3856 | - |
dc.contributor.localauthor | Lee, Sang-Gug | - |
dc.contributor.nonIdAuthor | Lee, Jae Woo | - |
dc.contributor.nonIdAuthor | Jeon, J. H. | - |
dc.contributor.nonIdAuthor | Kim, Y. G. | - |
dc.contributor.nonIdAuthor | Lee, S. Q. | - |
dc.contributor.nonIdAuthor | Yang, W. S. | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordAuthor | acoustic transducers | - |
dc.subject.keywordAuthor | microsensors | - |
dc.subject.keywordAuthor | plasma CVD | - |
dc.subject.keywordAuthor | planarisation | - |
dc.subject.keywordAuthor | air gaps | - |
dc.subject.keywordAuthor | internal stresses | - |
dc.subject.keywordAuthor | masks | - |
dc.subject.keywordAuthor | frequency response | - |
dc.subject.keywordAuthor | equivalent circuits | - |
dc.subject.keywordAuthor | active networks | - |
dc.subject.keywordAuthor | silicon compounds | - |
dc.subject.keywordAuthor | titanium compounds | - |
dc.subject.keywordAuthor | frequency 1 kHz | - |
dc.subject.keywordAuthor | voltage 9 | - |
dc.subject.keywordAuthor | 6 V | - |
dc.subject.keywordAuthor | TiN-Si3N4-TiN | - |
dc.subject.keywordAuthor | diaphragm-based capacitive-type MEMS acoustic sensor | - |
dc.subject.keywordAuthor | plasma-enhanced chemical vapour deposition | - |
dc.subject.keywordAuthor | PECVD | - |
dc.subject.keywordAuthor | polyimide sacrificial layer | - |
dc.subject.keywordAuthor | multilayer diaphragm | - |
dc.subject.keywordAuthor | residual stress | - |
dc.subject.keywordAuthor | parasitic capacitance | - |
dc.subject.keywordAuthor | air-gap resistance | - |
dc.subject.keywordAuthor | planarisation | - |
dc.subject.keywordAuthor | photomasks | - |
dc.subject.keywordAuthor | frequency response | - |
dc.subject.keywordAuthor | capacitance model | - |
dc.subject.keywordAuthor | equivalent circuit model | - |
dc.subject.keywordAuthor | voltage-controlled voltage source | - |
dc.subject.keywordAuthor | open-circuit sensitivity | - |
dc.subject.keywordPlus | MICROPHONE | - |
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