Effects of Bragg reflector annealing on performance factors of FBAR-based ultramass-sensitive sensors

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We present the film bulk acoustic wave resonator-based ultramass-sensitive (FBAR-UMS) sensors in which their resonance characteristic improvements, mainly due to Bragg reflector (BR) annealing, favorably influence their performance factors. We fabricated two kinds of FBAR-UMS sensors, respectively, with nonannealed and annealed BRs (namely, nonannealed and annealed sensors) and investigated the effects of BR annealing on their performance factors by comparing their resonance frequency shift (-f(r)), measured before and after each mass loading (m). As a result, the annealed sensors showed much larger mass-loading effect and detectable mass range than the nonannealed ones.
Publisher
WILEY-BLACKWELL
Issue Date
2015-09
Language
English
Article Type
Article
Citation

MICROWAVE AND OPTICAL TECHNOLOGY LETTERS, v.57, no.9, pp.2134 - 2137

ISSN
0895-2477
DOI
10.1002/mop.29282
URI
http://hdl.handle.net/10203/205615
Appears in Collection
EE-Journal Papers(저널논문)
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