DC Field | Value | Language |
---|---|---|
dc.contributor.author | Park, Seong-Jun | ko |
dc.contributor.author | Kim, Dae Woo | ko |
dc.contributor.author | Jang, Sung Woo | ko |
dc.contributor.author | Jin, Ming Liang | ko |
dc.contributor.author | Kim, Seon Joon | ko |
dc.contributor.author | Ok, Jong Min | ko |
dc.contributor.author | Kim, Jong-Seon | ko |
dc.contributor.author | Jung, Hee-Tae | ko |
dc.date.accessioned | 2016-04-20T06:47:58Z | - |
dc.date.available | 2016-04-20T06:47:58Z | - |
dc.date.created | 2016-01-04 | - |
dc.date.created | 2016-01-04 | - |
dc.date.created | 2016-01-04 | - |
dc.date.issued | 2016-01 | - |
dc.identifier.citation | CARBON, v.96, pp.491 - 496 | - |
dc.identifier.issn | 0008-6223 | - |
dc.identifier.uri | http://hdl.handle.net/10203/205487 | - |
dc.description.abstract | A graphite grid was fabricated using reactive ion etching with a stencil mask. The graphite film was synthesized through chemical vapor deposition on commercial Ni foil and was simply etched with a stencil mask using oxygen plasma during reactive ion etching. It had similar to 85% optical transmittance at a 550-nm wavelength and similar to 120 Omega/sq sheet resistance. Graphite grids placed on a human hand used to distinguish its motions showed high strain-sensing performance: its gauge factor ranged from 100 to 350, and its response times for strain loading and for release were short (10 and 80 ms, respectively). Because the graphite-based structures could be prepared in large quantities and because etching with a reusable stencil mask is very simple, mass production of high-performance motion sensors using the well-structured graphite grid is commercially feasible. | - |
dc.language | English | - |
dc.publisher | PERGAMON-ELSEVIER SCIENCE LTD | - |
dc.title | Fabrication of graphite grids via stencil lithography for highly sensitive motion sensors | - |
dc.type | Article | - |
dc.identifier.wosid | 000366078000058 | - |
dc.identifier.scopusid | 2-s2.0-84947917531 | - |
dc.type.rims | ART | - |
dc.citation.volume | 96 | - |
dc.citation.beginningpage | 491 | - |
dc.citation.endingpage | 496 | - |
dc.citation.publicationname | CARBON | - |
dc.identifier.doi | 10.1016/j.carbon.2015.09.080 | - |
dc.contributor.localauthor | Jung, Hee-Tae | - |
dc.contributor.nonIdAuthor | Park, Seong-Jun | - |
dc.type.journalArticle | Article | - |
dc.subject.keywordPlus | STRAIN SENSORS | - |
dc.subject.keywordPlus | GRAPHENE | - |
dc.subject.keywordPlus | TRANSPARENT | - |
dc.subject.keywordPlus | FILMS | - |
dc.subject.keywordPlus | GROWTH | - |
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