ABSOLUTE DISTANCE MEASUREMENT; FEMTOSECOND PULSE LASER; UPDATED EDLEN EQUATION; X-RAY INTERFEROMETRY; PLANAR MOTION STAGE; SURFACE ENCODER; MACHINE-TOOLS; REFRACTIVE-INDEX; MEASUREMENT-SYSTEM; TRACKING INTERFEROMETER
CIRP ANNALS-MANUFACTURING TECHNOLOGY, v.64, no.2, pp.773 - 796
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