DC Field | Value | Language |
---|---|---|
dc.contributor.author | Lee, Jae Woo | - |
dc.contributor.author | Je, CH | - |
dc.contributor.author | Kim, YG | - |
dc.contributor.author | Lee, SQ | - |
dc.contributor.author | Yang, WS | - |
dc.contributor.author | Lee, Sang Gug | - |
dc.date.accessioned | 2016-04-18T05:38:09Z | - |
dc.date.available | 2016-04-18T05:38:09Z | - |
dc.date.created | 2015-12-01 | - |
dc.date.issued | 2015-01-29 | - |
dc.identifier.citation | 2015 International Conference on Electronics, Information and Communication | - |
dc.identifier.uri | http://hdl.handle.net/10203/204668 | - |
dc.description.abstract | A capacitive-type micro-electro-mechanical system (MEMS) acoustic sensor with a diaphragm of Al/Si₃N₄/Al (0.1/0.4/0.1 µm) multi layer on a sacrificial layer of 3.0 µm polyimide is presented. It can make the total fabrication process simpler due to using O₂ gas as a releasing material. Furthermore, equivalent circuit modeling for the MEMS acoustic sensor is implement with a lumped model. the acoustic sensor had a modeled open-circuit sensitivity of –38.5 dBV/Pa at 1 ㎑ with a bias of 10.0 V, which shows good agreement with the measured one in the range from 100 ㎐ to 16 ㎑. | - |
dc.language | English | - |
dc.publisher | Institute of Electronics and Information Engineers | - |
dc.title | A Capacitive-type MEMS Acoustic Sensor with a Diaphragm of Al/Si3N4/Al Based on a Polyimide Sacrificial layer | - |
dc.type | Conference | - |
dc.type.rims | CONF | - |
dc.citation.publicationname | 2015 International Conference on Electronics, Information and Communication | - |
dc.identifier.conferencecountry | SI | - |
dc.identifier.conferencelocation | Grand hyatt, Singapore | - |
dc.contributor.localauthor | Lee, Sang Gug | - |
dc.contributor.nonIdAuthor | Lee, Jae Woo | - |
dc.contributor.nonIdAuthor | Je, CH | - |
dc.contributor.nonIdAuthor | Kim, YG | - |
dc.contributor.nonIdAuthor | Lee, SQ | - |
dc.contributor.nonIdAuthor | Yang, WS | - |
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