Open-circuit sensitivity model based on empirical parameters for a capacitive-type MEMS acoustic sensor

Abstract

An empirical-based open-circuit sensitivity model for a capacitive-type MEMS acoustic sensor is presented. To intuitively evaluate the characteristic of the open-circuit sensitivity, the empirical-based model is proposed and analysed by using a lumped spring-mass model and a pad test sample without a parallel plate capacitor for the parasitic capacitance. The model is composed of three different parameter groups: empirical, theoretical, and mixed data. The empirical residual stress from the measured pull-in voltage of 16.7 V and the measured surface topology of the diaphragm were extracted as +13 MPa, resulting in the effective spring constant of 110.9 N/m. The parasitic capacitance for two probing pads including the substrate part was 0.25 pF. Furthermore, to verify the proposed model, the modelled open-circuit sensitivity was compared with the measured value. The MEMS acoustic sensor had an open-circuit sensitivity of -43.0 dBV/Pa at 1 kHz with a bias of 10 V, while the modelled open-circuit sensitivity was -42.9 dBV/Pa, which showed good agreement in the range from 100 Hz to 18 kHz. This validates the empirical-based open-circuit sensitivity model for designing capacitive-type MEMS acoustic sensors.