Open-circuit sensitivity model based on empirical parameters for a capacitive-type MEMS acoustic sensor

Cited 1 time in webofscience Cited 0 time in scopus
  • Hit : 744
  • Download : 484
An empirical-based open-circuit sensitivity model for a capacitive-type MEMS acoustic sensor is presented. To intuitively evaluate the characteristic of the open-circuit sensitivity, the empirical-based model is proposed and analysed by using a lumped spring-mass model and a pad test sample without a parallel plate capacitor for the parasitic capacitance. The model is composed of three different parameter groups: empirical, theoretical, and mixed data. The empirical residual stress from the measured pull-in voltage of 16.7 V and the measured surface topology of the diaphragm were extracted as +13 MPa, resulting in the effective spring constant of 110.9 N/m. The parasitic capacitance for two probing pads including the substrate part was 0.25 pF. Furthermore, to verify the proposed model, the modelled open-circuit sensitivity was compared with the measured value. The MEMS acoustic sensor had an open-circuit sensitivity of -43.0 dBV/Pa at 1 kHz with a bias of 10 V, while the modelled open-circuit sensitivity was -42.9 dBV/Pa, which showed good agreement in the range from 100 Hz to 18 kHz. This validates the empirical-based open-circuit sensitivity model for designing capacitive-type MEMS acoustic sensors.
Publisher
IOP PUBLISHING LTD
Issue Date
2016-09-27
Language
English
Citation

6th International Conference on Materials and Applications for Sensors and Transducers

URI
http://hdl.handle.net/10203/204640
Appears in Collection
EE-Conference Papers(학술회의논문)
Files in This Item
This item is cited by other documents in WoS
⊙ Detail Information in WoSⓡ Click to see webofscience_button
⊙ Cited 1 items in WoS Click to see citing articles in records_button

qr_code

  • mendeley

    citeulike


rss_1.0 rss_2.0 atom_1.0