Defect probability of directed self-assembly lithography: fast identification and post-placement optimization
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Seongbo | ko |
| dc.contributor.author | Chung, Woo Hyun | ko |
| dc.contributor.author | Shin, Youngsoo | ko |
| dc.date.accessioned | 2016-04-18T04:49:27Z | - |
| dc.date.available | 2016-04-18T04:49:27Z | - |
| dc.date.created | 2015-11-23 | - |
| dc.date.created | 2015-11-23 | - |
| dc.date.created | 2015-11-23 | - |
| dc.date.issued | 2015-11-03 | - |
| dc.identifier.citation | 2015 International Conference On Computer Aided Design, pp.404 - 409 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/204222 | - |
| dc.language | English | - |
| dc.publisher | ACM SIGDA and IEEE CEDA | - |
| dc.title | Defect probability of directed self-assembly lithography: fast identification and post-placement optimization | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000368929600057 | - |
| dc.identifier.scopusid | 2-s2.0-84964504893 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 404 | - |
| dc.citation.endingpage | 409 | - |
| dc.citation.publicationname | 2015 International Conference On Computer Aided Design | - |
| dc.identifier.conferencecountry | US | - |
| dc.identifier.conferencelocation | Austin, Texas | - |
| dc.contributor.localauthor | Shin, Youngsoo | - |
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