Redundant via insertion in directed self-assembly lithography
| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Shim, Seong Bo | ko |
| dc.contributor.author | Chung, Woo Hyun | ko |
| dc.contributor.author | Shin, Young Soo | ko |
| dc.date.accessioned | 2016-04-18T04:39:54Z | - |
| dc.date.available | 2016-04-18T04:39:54Z | - |
| dc.date.created | 2015-11-23 | - |
| dc.date.created | 2015-11-23 | - |
| dc.date.issued | 2016-03-15 | - |
| dc.identifier.citation | Design, Automation & Test in Europe (DATE), pp.55 - 60 | - |
| dc.identifier.uri | http://hdl.handle.net/10203/204122 | - |
| dc.language | English | - |
| dc.publisher | European Design and Automation Association (EDAA) | - |
| dc.title | Redundant via insertion in directed self-assembly lithography | - |
| dc.type | Conference | - |
| dc.identifier.wosid | 000382679200010 | - |
| dc.identifier.scopusid | 2-s2.0-84973635813 | - |
| dc.type.rims | CONF | - |
| dc.citation.beginningpage | 55 | - |
| dc.citation.endingpage | 60 | - |
| dc.citation.publicationname | Design, Automation & Test in Europe (DATE) | - |
| dc.identifier.conferencecountry | GE | - |
| dc.identifier.conferencelocation | Internationales Congress Center Dresden | - |
| dc.contributor.localauthor | Shin, Young Soo | - |
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