Piezo-driven metrological multiaxis nanopositioner

Abstract

We report on the development of a metrological multiaxis nanopositioning device, which is operated by the piezo-based inertial method, as a sample stage for scanning probe microscopy. It has long moving range, unlimited in principle, and nanometer (microradian) resolution. Two operation methods, inertial sliding and inertial walking, can be applied to the stage and the inertial operating method can make the stage have a simple and compact structure. By the structure and operation method high positioning stability can be obtained which is an important requirement for scanning probe microscopy. For a metrological nanopositioner, a three axes laser interferometric sensing scheme is adopted for planar motion and a 15 channel high voltage amplifier is designed and computer based digital-to-analog conversion is adopted. Therefore the nanopositioner can be feedback controlled with many choices of voltage wave forms and control methods. Design of the nanopositioner and piezo-driver and experimental results are presented. The device provides step sizes of 0.016-10 mum at frequency up to about 7 kHz. The rotational range is limited by the interferometer alignment, 0.2 degrees, and the step size is 0.17-103 arcsec. (C) 2001 American Institute of Physics.