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NO | Title, Author(s) (Publication Title, Volume Issue, Page, Issue Date) |
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Deposition Characteristics of TiCN Deposited by Plasma Enhanced Chemical Vapor Deposition Chun , Soung Soon, Proc. 7th Int'l Conf. on Ion & Plasma Assisted Techniques, pp.254, International Conference on Ion and Plasma Assisted Techniques, 1989-05 | |
LPCVD of Blanket W Using A Gaseous Mixture of WF6, SiH4 and H2 Chun , Soung Soon, Proc. 16th Int'l Conf. on metallurgical Coatings, International Conference on Metallurgical Coatings, 1989-04 |